Shiva Purana
अचेतनत्वात्प्रकृतेरज्ञत्वात्पुरषस्य च ॥ प्रधानपरमाण्वादि यावत्किंचिदचेतनम् ॥ १४ ॥
Because of the unconsciousness of nature and the ignorance of the soul As far as anything unconscious, such as the principal atom.
english translation
acetanatvAtprakRterajJatvAtpuraSasya ca ॥ pradhAnaparamANvAdi yAvatkiMcidacetanam ॥ 14 ॥
hk transliteration by Sanscript