Shiva Purana

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तन्मात्राणां द्वितीयस्तु भूतसर्गः स उच्यते ॥ वैकारिकस्तृतीयस्तु सर्ग ऐन्द्रियकः स्मृतः ॥ १४ ॥

The first creation of Brahmā is that of Mahat; the second is that of subtle elements and is called Bhūtasarga; the third is known as organic.

english translation

tanmAtrANAM dvitIyastu bhUtasargaH sa ucyate ॥ vaikArikastRtIyastu sarga aindriyakaH smRtaH ॥ 14 ॥

hk transliteration by Sanscript