Shiva Purana
प्रधानात्प्रथमं जज्ञे वृद्धिः ख्यातिर्मतिर्महान् ॥ महत्तत्त्वस्य संक्षोभादहंकारस्त्रिधा ऽभवत् ॥ १३ ॥
In the beginning were born the cosmic intellect, the great principle. When it was agitated the ego was born. The ego was split into three.
english translation
pradhAnAtprathamaM jajJe vRddhiH khyAtirmatirmahAn ॥ mahattattvasya saMkSobhAdahaMkArastridhA 'bhavat ॥ 13 ॥
hk transliteration by Sanscript