Shiva Purana

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प्रधानात्प्रथमं जज्ञे वृद्धिः ख्यातिर्मतिर्महान् ॥ महत्तत्त्वस्य संक्षोभादहंकारस्त्रिधा ऽभवत् ॥ १३ ॥

In the beginning were born the cosmic intellect, the great principle. When it was agitated the ego was born. The ego was split into three.

english translation

pradhAnAtprathamaM jajJe vRddhiH khyAtirmatirmahAn ॥ mahattattvasya saMkSobhAdahaMkArastridhA 'bhavat ॥ 13 ॥

hk transliteration by Sanscript